Nikon

Ellipsiz DSS is proud to be Nikon Lithography sales representative in the Southeast Asia for over 20years. The lithography system is said to be the most precise machine ever created. It boasts precision down to a mere 1 nanometer [1/109 (billion) of 1m]. Take a look at the latest line up of Nikon semiconductor lithography systems, the definitive engines driving the global manufacturing of semiconductors and flat panel displays.

Ellipsiz DSS – Distributor of Semiconductor Equipment

Deep UV

Nikon offers the industry-leading NSR-S322F ArF and NSR-S220D KrF scanners, which utilize the innovative Streamlign platform to deliver world-class performance for critical non-immersion layers. The successful combination of the Stream Alignment and Five-Eye FIA systems enables scanner throughput ≥ 230 wafers per hour. In addition, proven Bird’s Eye Control enables single machine overlay accuracy ≤ 2 nm for the S322F and ≤ 3 nm for the S220D, coupled with outstanding overlay stability. Nikon recognizes chipmakers have diverse production objectives, and also offers the NSR-S210D KrF scanner, which employs established Tandem Stage technology to satisfy less-critical 248 nm requirements with low cost of ownership.

NSR-S322F

Industry-leading scanner for dry ArF applications

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NSR-S220D

Industry-leading scanner for KrF applications

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NSR-S210D

A high productivity KrF scanner for sub-critical layers

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