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Electrical Analysis

Combine PICA with EMMI

  • Leverage the time-integrated 2D EMMI imaging capability for fast fault localization
  • Leverage the time-resolved probing capabilities of 1D PICA to advance signal characterization and circuit debugging

Fault Isolation

  • Determine logical & physical location of the fail
  • Reduce the physical inspection area by narrowing down the fail locations space
  • Leverage optical fail localization techniques
  • Non-destructive removal of layers

PICA for failure analysis

PICA waveform diagram

EMMI Functionality

The Model 450PM 8” probe station  is designed to grow with your application with industry leading upgradeability options. The 450PM offers value with its low cost of ownership and stable, reliable probing performance. With a design based on Micromanipulators popular Model 4060 probe station, extensive application coverage and flexible options, the 450PM is quickly becoming the probe station of choice for cost conscience test labs around the world.

Our customers expect Micromanipulator probe stations to provide stability with open, flexible designs that incorporate precise, dependable mechanics. The 450PM continues this tradition in a more economical station for those customers not needing the low current capability, precise positioning and additional convenience features of the popular 4000 and 8000 series probe stations

Start out with a standard 450PM platform, and field upgrade as your needs change.  Popular upgrades include:

  • High resolution optics and optics positioning
  • Thermal chuck systems for ambient (room temperature) to 400C
  • Probe card hardware
  • Efficiency enablers

The 450PM is the prober of choice when you need Micromanipulator performance and configurability in a easy to upgrade platform.

The Micromanipulator Model 4060 probe station is a high efficiency general purpose 6 – 8” (150 – 200mm) manual analytical probe station. The 4060 is designed for ease of use in everyday failure analysis, device characterization, and reliability testing applications. The 4060 station combines the value of efficient use with the confidence of consistent, accurate electrical and mechanical performance. The 4060 is the most efficient, stable and reliable 150 / 200mm general purpose probe station in the industry.

Available options for the model 4060 probe station allow you to configure it for your specific needs. Probe card holders, thermal chucks, manipulators, unique probe holders, vibration isolation tables, light tight enclosures (LTEs) and camera systems are popular accessory options. Station configuration options include an independent microscope lift and lock lever assembly, platen lift with adjustable microscope lift delay and an integrated dark – dry environment that supports low temperature, frost free probing.  The 4060 supports three temperature ranges:

  • Ambient (room temperature) to 400C
  • 0C to 400C
  • -65C to 400C

The price-performance value of the model 4060 coupled with low cost – of – ownership from its high efficiency features and rugged reliability combine to make it a truly cost effective answer for a general purpose analytical probe station.

The Micromanipulator Model 8060 200mm manual probe station offers the highest performance available in a 6 – 8” (150 – 200mm) manual analytical probe station. The 8060 is designed for ease of use in demanding applications such as very low current and voltage probing, high and low temperature probing, and sub-micron target probing to the limits of visible optics.

The 8060 station combines the value of efficient use with the confidence of consistent, accurate electrical and mechanical performance, and is the manual 150 / 200mm probe station of choice for demanding analytical test professionals around the world.

Available options for the model 8060 probe station allow you to configure it for your specific needs. Probe card holders, thermal chucks, manipulators, unique probe holders, vibration isolation tables, light tight enclosures (LTEs) and camera systems are popular accessory options.  Three temperature ranges are supported.

The 8060 may also be configured with an integrated environment that supports dark – shielded – dry probing.  Three temperature ranges are supported:

  • Ambient (room temperature) to 400C
  • 0C to 400C
  • -65C to 400C

The price-performance value of the model 8060 coupled with low cost – of – ownership from its high efficiency features and rugged reliability combine to make it a truly cost effective answer for high performance analytical probing.

The Micromanipulator P300A 300mm semiautomatic probe station is the most stable, intuitive, and space efficient 300mm semi-automatic analytical probe station available today. Designed for low current, sub-micron positioning applications, the P300A comes standard with features such as single-point ground, dry/dark environment, and integrated thermal chuck plumbing. Built for reliability as well as precision, the P300A features closed-loop operation with massive stage and platen drives, a robust chuck mount and a harmonic theta drive.

The P300A uses NetProbe 7 software, Micromanipulator’s revolutionary prober control software. Navigator, Inter-active Video, Memory List, Wafer Map, EdgeSense pattern recognition, and Setup modules provide full functionality with a wealth of high level features including Video Positioning and Snap Alignment, Die to Die and In-Die stepping. Motorized controls placed conveniently at the front of the station allow simple manual control of this semi-automatic station when programmability is not required.

Both joystick and MicroTouchTM controls intuitively operate the station stage, platen (Z), and theta as well as the microscope X-Y and Z drives. A local touch-screen display also provides setup and operational programmability locally to the probe station hardware. Drivers from popular tester companies including Keysight, Keithley, and LabVIEW

The P300A can be configured with Micromanipulators “Top Hat” for level, frost free temperature testing.  Three temperature ranges are supported:

  • Ambient (room temperature) to 300C
  • 0C to 300C
  • -55C to 300C

The P300A is the 300mm prober of choice for those requiring highly accurate step and repeat, even at temperature.

The Micromanipulator P300J 300mm probe station is the most stable, intuitive, and space efficient manual 300mm analytical probe station available today. Designed for low current, sub-micron positioning applications, the P300J comes standard with features such as single-point ground, dry/dark environment, and integrated thermal chuck plumbing. Motorized controls placed conveniently at the front of the station give a dynamic speed range which allows both precise positioning and long-distance moves.

Both joystick and MicroTouchTM controls intuitively operate the station stage, platen (Z), and theta as well as the microscope X-Y and Z drives.  The P300J’s large magnetic stainless steel platen has plenty of room for multiple manipulators and/or a probe card.

The system supports a wide choice of options, and is even backward compatible with accessories (manipulators, probe holders, probe card holders) from our industry-standard 4000 and 8000 series (200mm) stations.

The station includes an adjustable microscope lift delay which prevents driving the probes into the microscope objective, a feature that Micromanipulator pioneered, and which is a hallmark of our professional probing systems.

The P300J may be configured for thermal applications, including our Micromanipulator’s “Top Hat” for low level, frost free below ambient testing.  Three temperature ranges are supported:

  • Ambient (room temperature) to 300C
  • 0C to 300C
  • -55C to 300C

The P300J is the platform of choice for companies who need to probe whole 300mm wafers, but don’t require a semiautomatic probe station for large volume tests.

The Micromanipulator P300L 300mm semiautomatic probe station comes standard with features such as single-point ground and integrated thermal chuck plumbing. Built for reliability as well as precision, the P300L features leadscrew – leadnut stage and platen drives, a stainless-steel platen with removable front wedge and high stability microscope bridge that supports all high resolution long-working distance microscopes.

The P300L ‘s versatile controller supports USB and GPIB communications (configured with proper options). The stage X-Y and platen (Z) are motorized / programmable. Microscope motorized / programmable control is also an option. The system may be controlled via scripts and all popular parametric test analytical prober drivers.

Micromanipulator strives to ensure our semiautomatic systems are flexible so that applications like low current, low capacitance, 1/f,  hot and cold testing, long term reliability, high power, high frequency, mmW, MEMS, magnetic sensitivity testing, high-speed pulse dynamic I/V analysis and more can be accomplished with ease. The P300L allows you to automate testing plans for maximum efficiency and large data set acquisition without user intervention.

Joystick control allows for easy and quick operation when programmability is not required. The joystick intuitively operates the station stage, platen, and microscope for systems so configured.

Use the P300L with probe cards, individual probes, or both together!

The P300L may be configured with a local dry / shielded / dark environment “Top Hat” for low level or low temperature, frost free probing. Three temperature ranges are supported:

  • Ambient (room temperature) to 300C
  • 0C to 300C
  • -55C to 300C

The P300L is the station of choice for a high performance, full capability, first in class flexibility, and cost-effective 300 mm semi-automatic probe station.

The Micromanipulator P200L 200mm semiautomatic probe station comes standard with features such as single-point ground and integrated thermal chuck plumbing. Built for reliability as well as precision, the P200L features leadscrew – leadnut stage and platen drives, a stainless steel platen with removable front wedge and high stability microscope bridge that supports all high resolution long-working distance microscopes.

Customize your P200L for two popular host control methods:

  • Direct to the standard non-Windows based controller, or
  • Direct to the optional NetProbe 7 software to unleash the power of an included wafer map, integrated video, theta alignment, sub-die, and pattern recognition

The standard P200L ‘s versatile Non-windows based controller supports USB or GPIB, (depending on ordered configuration) communications. The stage X-Y and platen (Z) are motorized / programmable. Microscope motion is manual. The system may be controlled via scripts and all popular parametric test analytical prober drivers. An indexing script with user GUI and a Labview VI is provided allowing use of the system right out of the box.

Micromanipulator strives to ensure our semiautomatic systems are flexible so that applications like Magnetic sensitivity testing, Probe cards, mmW, Wafer & Board level testing. Once you have developed your testing plan we also have great relationships so we can move you into a fully automatic probe station if needed.

Standard joystick control allows for easy and quick operation when programmability is not required. The joystick intuitively operates the station stage and platen.

The P200L may be configured with a local dry / shielded / dark environment and “Top Hat” for low level or low temperature, frost free probing. Three temperature ranges are supported:

  • Ambient (room temperature) to 400C
  • 0C to 400C
  • -65C to 400C

The P200L is the station of choice for a high performance, full capability and cost-effective 200 mm semi-automatic probe station.

The patented wafer level to system level probe system with above and below ambient temperature capabilities.

The patented Micromanipulator VERSA modular probe system has been specifically designed to change into the probe system you need at that moment with wafer level probe capability all the way to board level testing, making post tape-out product testing easier than ever.

The VERSA enables you to probe any device at above and below ambient temperatures without limiting your ability to exercise your device and without limiting the probing capability employed at the wafer level. Using the VERSA, you can trace and analyze issues that manifest at the beginning stages of your device all the way to the end application environment faster, easier, and with less headache than previously possible.

With the VERSA, you can probe:

  • Any device up to 24″ square in ambient mode, and; up to 18″ square in temperature mode.
  • Wafers up to 300mm.
  • Wafer pieces and oddly shaped/sized test samples.
  • Custom.

Each VERSA comes complete with:

  • Integrated vibration isolation base platform.
  • Upgradeable temperature options.
  • Microscope system of your choice.
  • Large translation manual microscope motion with precise fine motion.
  • Two independent, move able platens.
  • Manipulators of your choice.
  • Integration with popular high-resolution emission microscope to pinpoints failure locations, top down and DSP, with temperature too!
  • Probe holders and tips of your choice.  Choose from passive, active, RF, and many more.

The worlds first true system level Flip Chip & Double Sided probe system with above and below ambient temperature capabilities.

The patented Micromanipulator VERSA system combines a compatible probe station that has been specifically designed to consider wafer level probe capability to the test board level and assist with post tape-out product testing, wafer level testing, and now double sided probing needs.

The VERSA enables you to probe decapsulated IC’s mounted onto test boards at above and below ambient temperatures without limiting your boards ability to exercise your chip and without limiting the probing capability employed at the wafer level. Using the VERSA, you can trace and analyze issues that manifest only in the actual end application environment faster, easier, and with less headache than previously possible.

With the VERSA, you can probe:

  • Application boards measuring up to 26″ square in ambient mode, and up to 18″ in temperature mode.
  • Wafers up to 450mm.
  • Wafer pieces and oddly shaped/sized test samples.
  • Temperature range supported: frost free -40C to 125C.
  • Flip Chip/Dual Sided Probing and imaging

Each VERSA comes complete with:

  • Flip Chip/Dual Sided Probing camera systems with integrated high resolution positioning
  • Flip Chip/Dual Sided Probing device holders
  • Integrated vibration isolation base platform.
  • Upgradeable temperature option.  Choose frost free -40C to 125C, or ambient to 400°C
  • Microscope system of your choice.
  • Large translation manual microscope motion with precise fine motion.
  • Two independent, moveable platen.
  • Manipulators of your choice (up to 10).
  • Probe holders and tips of your choice.  Choose from passive, active, RF, high voltage, and more.
  • Integration with popular high-resolution emission microscope to pinpoints failure locations, top down and DSP, with temperature too!
Electrical Analysis
Combine PICA with EMMI Leverage the time-integrated 2D EMMI imaging capability for fast fault localization Leverage the time-resolved probing capabilities of 1D PICA to advance signal charact Read More
The Model 450PM 8” probe station  is designed to grow with your application with industry leading upgradeability options. The 450PM offers value with its low cost of ownership and stable, reli Read More
The Micromanipulator Model 4060 probe station is a high efficiency general purpose 6 – 8” (150 – 200mm) manual analytical probe station. The 4060 is designed for ease of use in everyday failure Read More
The Micromanipulator Model 8060 200mm manual probe station offers the highest performance available in a 6 – 8” (150 – 200mm) manual analytical probe station. The 8060 is designed for ease of u Read More
The Micromanipulator P300A 300mm semiautomatic probe station is the most stable, intuitive, and space efficient 300mm semi-automatic analytical probe station available today. Designed for low current Read More
The Micromanipulator P300J 300mm probe station is the most stable, intuitive, and space efficient manual 300mm analytical probe station available today. Designed for low current, sub-micron positioni Read More
The Micromanipulator P300L 300mm semiautomatic probe station comes standard with features such as single-point ground and integrated thermal chuck plumbing. Built for reliability as well as Read More
The Micromanipulator P200L 200mm semiautomatic probe station comes standard with features such as single-point ground and integrated thermal chuck plumbing. Built for reliability as well as precision Read More
The patented wafer level to system level probe system with above and below ambient temperature capabilities. The patented Micromanipulator VERSA modular probe system has been specifically designed Read More
The worlds first true system level Flip Chip & Double Sided probe system with above and below ambient temperature capabilities. The patented Micromanipulator VERSA system combines a compatible Read More

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