Process Equipment

Cougar EVO X-ray Inspection

Cougar EVO highlights: Future-ready for the demands of Industry 4.0 In today’s smart factory, everything revolves around connectivity and self-optimizing processes. Industry 4.0 demands quality control systems that offer improved automated inspections and can become an integral part of the production line. Based on customer input, Comet Yxlon upgraded the Cougar EVO system with advanced …

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Temescal FC2000 / BJD-2000 Bell Jar Deposition System

Convertible Bell Jar for Small-Scale Production and R&D Applications Temescal’s BJD-2000 and FC-2000 are versatile evaporation systems that accept a variety of accessories to meet almost any requirement. Engineered for efficient operation and clean room compatibility, these systems combine maximum flexibility with ease of use. The FC-2000 is a fast- cycle, load-locked system that allows …

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Temescal FC-2800 / BCD-2800 Deposition System

Mid-Sized Coaters for Production and Large-Wafer R&D Applications The Temscal FC-2800 and BCD-2800 are clean room-compatible coaters that offer high-throughput efficiency and lift-off capability at a source-to-substrate distance of either 34″ (866mm) or 42″ (1076mm). Both systems can be configured for either freestanding or through-the-wall clean room installation, and both support numerous combinations of deposition …

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Temescal FC-3800 Deposition System

Ideal for Production Lift-Off, Step-Coverage, and Dual-Sided Coating Applications The Temscal FC-3800 enables rapid processing of 150mm diameter wafers for lift off and/or step coverage applications. In each load, this load lock system can coat twenty-five 150mm diameter wafers for lift off or thirty-six 150mm wafers for step coverage. The 38″ x 38″ x 28″ …

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Temescal FC-4400 Deposition System

Load Locked and Optimized for Lift-Off Processes The Temescal FC-4400 represents our ultimate classic-configuration, high-throughput platform for lift-off oriented evaporation. This system is designed to support the metallization of thirty 150mm wafers per load via high capacity e-beam evaporation. The load locked, 44 inch x 44 inch x 28 inch product chamber can be pumped …

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