EM3i

EM3i

A dedicated, automated, timesaving and user-friendly system that enable TEM/STEM and SEM sample preparation for both cross section and plan view in a wide range of application. Featuring a cryo-cooled, dry sawing process, the EM3 system prepares specimens of either crystalline or amorphous materials. The output sample is mounted onto a compatible TEM mount that allows rework.

Highlights

  • Applicable for site-specific and general area
  • Enables multiple reworks of TEM specimen
  • Interfaces with broad and focused ion milling
  • Increases overall throughput
  • Improves yield analysis
  • Improves characterization
  • Low cost of ownership

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